Yes i know the paper but the solvents that you have cited cause only
swelling and don't dissolve the pdms.

2009/11/18 Gareth Jenkins :
> Toluene or Chloroform should cause swelling in PDMS and I think are OK with
> SU-8.
>
> Check out this ref for more possible solvents:
> Anal. Chem. 2003, 75, 6544-6554