Hello,

Use the following to dissolve PDMS completely:
1.0 M solution of tetra-n-butyl ammonium fluoride (TBAF) in
N,N-dimethylformamide (DMF) for 48 h.  This solution will completely
dissolve PDMS (time can vary depending on thickness of PDMS layer). And
hopefully it will not effect SU-8. I have tried the myself about 2 year
back. for reference please check Adv. Mater. 2007, 19, 727–733
"Microsolidics: Fabrication of Three-Dimensional Metallic Microstructures in
Poly(dimethylsiloxane)"

Best regards
Amit
--
Dr. Amit Asthana
Senior Research Officer
Australian National Fabrication Facility(QLD Node)
Australian Institute of Bioengineering and Nanotechnology
The University of Queensland, Building 75, Room 260,
QLD 4072 Australia
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