I've heard reports from Max Planck Institute in Stuttgart where e-beam was
suspected to have hard-baked the PR with subsequent low-success rate for lift-
off, although in that case not sure if image-reversal (for essential negative
sidewall) was being used.

Thomas E. Wilson
Professor of Physics
Marshall University
Science 154
One John Marshall Drive
Huntington, WV  25755-2570
Tel: 304.696.2752
FAX: 304.696.2494