I just saw this book on Amazon. It might be helpful to the current discussion. Germanium Silicon: Physics and Materials, Volume 56 (Semiconductors and Semimetals) by John C. Bean, Robert Hull, Robert K. Willardson, and Eicke R. Weber (Hardcover - Nov. 16, 1998) used from $31.43 Roger Brennan Applications Director Solecon Labs -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On Behalf Of Ned Flanders Sent: Saturday, February 20, 2010 5:26 AM To: mazzolari@fe.infn.it; General MEMS discussion Subject: Re: [mems-talk] SiGe deposition Hi Andrea, Would you be so kind and get back to us when you find some useful references? That is, could you please post here the articles you found most helpful to you? Thanks in advance m