durusmail: mems-talk: pyrex/pyrex anodic bonding
pyrex/pyrex anodic bonding
2010-05-18
2010-05-18
2010-05-18
2010-05-19
2010-06-02
2010-06-02
pyrex/pyrex anodic bonding
A.ALLOUCH
2010-06-02
Hi,

Thank you for your answer. What about the thikness of SI3N4?

best,

Alaa


Starlight a écrit :
> Hi,
>
> Use an ion barrier such as Si3N4 to trap the Na+ ions, then a glass to
> Si3N4 interface at 400 C should bond.
>
> Best regards,
>
> Julian.

--
Alaa el dine ALLOUCH
Doctorant au LAAS-CNRS-Groupe N2IS
7 Av colonel Roche, 31077 Toulouse
Tél : 05 61 33 78 71

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