You also need to keep the SF6 delivery pipe warm, using a heated blanket, to
reduce the SF6 from condensing
in the pipe, because of  low V.P
----- Original Message -----
From: "Glenn Silveira" 
To: "General MEMS discussion" 
Sent: Wednesday, July 07, 2010 5:58 PM
Subject: Re: [mems-talk] SF6 / BCl3 issue


> John,
>
> The BCl3 I understand the SF6 not so much. The BCl3 is a toxic and
> corrosive
> gas with a low vapor pressure. To facilitate BCl3 you will need a gas
> cabinet with gas detection, sub-atmospheric regulator, temperature
> controlled gas lines and or the delivery system installed very close to
> the
> tool (i.e. in the clean room.)
>
> Good luck with facilities and safety.
>
> Regards,
> Glenn
>
>
> -----Original Message-----
> From: John Montoya [mailto:redshift@unm.edu]
> Sent: Tuesday, July 06, 2010 6:38 PM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] SF6 / BCl3 issue
>
>
> Hello everyone.
>
> I am trying to perform a selective GaAs / AlGaAs etch.  I
> recently put in a request to my cleanroom manager to
> incorporate SF6 and BCl3 onto our PlasmaTherm SLR750
> series ICP/RIE machine.  For some unexplained reason, I
> was denied from putting SF6 and BCl3 onto our machine.
> Does anyone know of any safety or contamination issues
> associated with these two gases?  Please help.
>
> Sincerely,
> John
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