Xiaoyong, This is a maybe cure. If you use image reversal to create a reverse profile for lift off you can use thicker resist and not need to bake as long. It may make the process more acceptable. I can offer free tests of the process if it is a possible way to go. Bill Moffat, CEO Yield Engineering Systems, Inc. 203-A Lawrence Drive, Livermore, CA 94551-5152 (925) 373-8353 www.yieldengineering.com -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Xiaoyong Liu Sent: Wednesday, July 21, 2010 11:39 AM To: mems-talk@memsnet.org Subject: [mems-talk] direct patterning/fabrication on existing SiN membrane Hi, I am in the process of fabrication of some patterning on SiN membrane window. It involves of lithography, film deposition and liftoff. Since membrane is so fragile(the thickness is about less or around 100nm), it is very easy to break during lift off/ cleaning process which may require sonication, some times even N2 blow dry may damage membrane window. I am wondering if anyone have experience of how to handle it and share it with me. Thanks Xiaoyong