What is the membrane size ?

Some time ago i fabricated SiN membrane of thickness 100nm and lateral
size 2x2mm and had not problems handling the wafer/membrane.
Please note that my SiN was LPCVD super low stress nitride.

Best regards,
Andrea

> Hi,
>    I am in the process of fabrication of some patterning  on SiN membrane
> window. It involves of lithography, film deposition and liftoff. Since
> membrane is so fragile(the thickness is about less or around 100nm), it
> is very easy to break during lift off/ cleaning process which may
> require sonication, some times even N2 blow dry may damage membrane
> window.  I am wondering if anyone have experience of how to handle it
> and share it with me.
>
> Thanks
>
> Xiaoyong