I don't know what the cause of the loss of reflection, but I suggest that you try a thicker titanium layer, e.g. 50-100 nanometers of Ti, in order to avoid pinholing and provide an adequate barrier and adhesion layer. Good luck. -----Original Message----- From: andrew lyonTo: MEMS@ISI.EDU Date: Friday, November 06, 1998 11:36 PM Subject: what am i doing wrong with ti adhesion layers? >What am i doing wrong with Ti adhesion layers? I am thermally >evaporating 50-100nm Au films on glass substrates with 2-5nm Ti adhesion >layers. After a few days, the films turn from reflective Au to a frosty >white color. Is this titanium oxidation or some other diffusion process >I am unfamiliar with? > >Thanks > >L. Andrew Lyon, Assistant Professor >School of Chemistry and Biochemistry >Georgia Institute of Technology >Atlanta, GA 30332 > >andrew.lyon@chemistry.gatech.edu > >