Andrew: Ti and Au react to form intermetallic compounds. You need to put a Pt or Pd barrier layer in between the Ti and the Au. We discovered all these effects 30 years ago when we were using Au metallization in devices. -=RBF=- >What am i doing wrong with Ti adhesion layers? I am thermally >evaporating 50-100nm Au films on glass substrates with 2-5nm Ti adhesion >layers. After a few days, the films turn from reflective Au to a frosty >white color. Is this titanium oxidation or some other diffusion process >I am unfamiliar with? > >Thanks > >L. Andrew Lyon, Assistant Professor >School of Chemistry and Biochemistry >Georgia Institute of Technology >Atlanta, GA 30332 > >andrew.lyon@chemistry.gatech.edu > >