Hi

I am wondering if someone in this community has prepared SU8
lithography wafers in 2 layers.

I am attempting to make a 30um high layer of patterns (SU8-2025) over
which I want to make another 15um (SU8-3010) high features.

In particular, it will be most helpfull to know what adjustments I
should make in baking temps, time and exposure dose, times on both
layers, if there is any need for that.

Thank you very much

--
Abhishek Jain
Steele Lab for Tumor Biology
Harvard Medical School
Massachusetts General Hospital
149 13th Street
Charlestown MA 02129

PhD Candidate
Biomedical Engineering
Boston University
44 Cummington Street
Boston, MA 02114