We use sapphire backing wafers (so we can look from the backside for endpoint) and Crystalbond 509 wax for adhesion. Melt the wax at 125 °C, comes off in acetone. Jim On Nov 9, 2010, at 10:27 AM, Jonathan Abbott wrote: > The project I am working on involves through wafer etching with a DRIE > machine. I am interested to see how this is done in other facilities. > My current process involves attaching a patterned piece of silicon to > another 4" wafer (the only size our STS will accept). I tried spinning > a thick coat of photoresist on the carrier wafer and exposing an area > in the middle for my sample (so that I would have better thermal > contact to the sample. I use cool grease to attach the sample to the > carrier wafer.) and that seemed to work ok, but there must be a better > way. > > Any ideas? > > > Jonathan Abbott > jdabbott@byu.net