durusmail: mems-talk: RF-DC sputtering _ need some suggestion(s)
RF-DC sputtering _ need some suggestion(s)
2011-01-26
2011-01-26
2011-01-26
2011-01-28
2011-01-28
2011-01-28
2011-01-31
RF-DC sputtering _ need some suggestion(s)
Yassine AEA
2011-01-31
Hi Kagan,

Thanks a lot. Today , the first sample will be grown using all the
suggestions and ideas that all of you have proposed and hope that it will
work or at least will decrease the %O.

Thanks again to all of you,
Yassine, Ait El Aoud

On Fri, Jan 28, 2011 at 1:43 PM, Kagan Topalli <
ktopalli@electroscience.osu.edu> wrote:

> Dear Yassine,
>
> It is partly mentioned by some other colleagues replying this post. I
> recommend to make longer pre-sputtering sessions "at higher powers" before
> opening the shutter. It helps to clean the surface of the target. It may
> improve the quality of the deposition. Dehydration of the substrates before
> sputter coating may also bring an improvement.
>
> Best,
> Kagan
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