Hi,

I am trying to etch 500um Si wafer with %30 KOH at 80C.  I bought Protek
PSB coating in order to protect my front side however the adhesion is
very bad.  Does anybody have intel about this issue and how to overcome?

Thanks in advance


Temmuz CEYHAN
M.Sc. Student
-----------------------------------------------
Dept. of Electrical and Electronics Engineering
+90(312)-290-1247
Advanced Research Labs / National Nanotechnology Research Center
+90(312)-290-3525
BILKENT UNIVERSITY
06800
ANKARA/TURKEY