Hello Temmuz.

Usually an organosilane of some sort will help with the adhesion.  You
can try a dehydration bake followed by application of HMDS.  When I used
Protek I used an adhesion promoter with good results from HD
Microsystems.

Good luck.

Best Regards,

Dustin Warren, PE

EV Group
invent * innovate * implement
Strategic Account Manager North America - Direct: +1 (480) 305 2447,
Main: +1 (480) 305 2400 Fax: +1 (480) 305 2401
Cell: +1 (480) 274 3894
E-Mail: D.Warren@EVGroup.com, Web: www.EVGroup.com


-----Original Message-----
From: Temmuz [mailto:tceyhan@ee.bilkent.edu.tr]
Sent: Monday, February 07, 2011 5:39 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Protek adhesion problem

Hi,

I am trying to etch 500um Si wafer with %30 KOH at 80C.  I bought Protek

PSB coating in order to protect my front side however the adhesion is
very bad.  Does anybody have intel about this issue and how to overcome?

Thanks in advance

Temmuz CEYHAN
M.Sc. Student