I would discuss with Brewer Science. There are numerous organosilanes specially designed for different types of organic adhesion. Call Gelest and get their free catalogue which lists hundreds of applicable chemicals. If you need any help in getting the right material down in the best possible way contact me. Bill Moffat -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Warren Dustin Sent: Monday, February 07, 2011 9:44 AM To: General MEMS discussion; tceyhan@ee.bilkent.edu.tr Subject: Re: [mems-talk] Protek adhesion problem Hello Temmuz. Usually an organosilane of some sort will help with the adhesion. You can try a dehydration bake followed by application of HMDS. When I used Protek I used an adhesion promoter with good results from HD Microsystems. Good luck. Best Regards, Dustin Warren, PE EV Group