Depending on the process conditions and thickness of aluminum you're using (thinner is better), temperature can be a problem. SU-8 will start to burn above 200C. Dan Ruiz ________________________________ From: mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org on behalf of Sheng Zhang Sent: Fri 2/11/11 8:01 AM To: General MEMS discussion Subject: [mems-talk] metal deposition on SU-8 Hi, All I need to deposit (e-beam evaporation) Aluminum on SU-8 2002 (developed), and there are subsequent patterning steps for aluminum. Is there anything I need to watch out? Is there any tricks to improve adhesion? Any advice would be greatly appreciated! Thanks! Sheng