Tips for enhancing the adhesion:

1. Expose your PR/SU-8 film to O2 plasma for at least 60secs, and immediately
load your samples/wafers into the vacuum chamber for Al deposition.

2. Deposit the Al film at the lowest power/dep rate possible and cool down the
samples/ wafers after each deposition step.

Good luck.

Pramod Gupta
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646

--- On Fri, 2/11/11, Sheng Zhang  wrote:

From: Sheng Zhang 
Subject: [mems-talk] metal deposition on SU-8
To: "General MEMS discussion" 
Date: Friday, February 11, 2011, 8:01 AM

Hi, All

I need to deposit (e-beam evaporation) Aluminum on SU-8 2002 (developed),
and there are subsequent patterning steps for aluminum. Is there anything I
need to watch out? Is there any tricks to improve adhesion? Any advice would
be greatly appreciated!

Thanks!
Sheng