I was wondering if anyone has a recipe for AZ5214 as a negative photoresist (or any other negative photoresist) that has good step coverage, and overcut sidewalls. I have been trying for a while to use positive photoresist as a continuity layer that resides between a MMIC chip set in a cavity and a Ti/Au seedlayer for electroplating. I deposit KMPR on top of the seed layer as an electroplating mold and the solvents in the KMPR react with the positive photoresist. It doesn't seem to matter than I have thickened my seed layer in attempts to better isolate the two layers. So I would like to try and use a negative resist which hopefully will hold up better to the KMPR. But I still need good step coverage and a good, overcut sidewalls so my seed layer is still continuous. Thank you, Parrish