durusmail: mems-talk: photolithography resolution (su-8 series)
photolithography resolution (su-8 series)
2011-02-28
2011-02-28
photolithography resolution (su-8 series)
baifenzhi3@126.com
2011-02-28
Dear everyone,

I am using photoliyhography technique to make a 10um width pattern. I am not
sure i can get it.

Does anybody know the resolution of photolithography?

Thanks in advance
Regards
reply