You should be able to easily get better than 5 microns Dr Michael Cooke R&D Scientist PETEC The Centre for Process Innovation (CPI) Thomas Wright Way, NETPark, Sedgefield, Co Durham, United Kingdom, TS21 3FG T: +44 (0)1740 625 617 E: michael.cooke@uk-cpi.com W: www.uk-cpi.com/PETEC -----Original Message----- From: 첸로 [mailto:baifenzhi3@126.com] Sent: 28 February 2011 03:39 To: mems-talk Subject: [mems-talk] photolithography resolution (su-8 series) Dear everyone, I am using photoliyhography technique to make a 10um width pattern. I am not sure i can get it. Does anybody know the resolution of photolithography? Thanks in advance Regards