Depends upon the thickness of the resist. I have not used SU8 but with standard negative resist think approximately the same resolution as the thickness of the resist. With standard positive resist think about 25 to 50% of the resist thickness. With resolution tricks like image reversal thing about 10% of the positive resist thickness. Best resolution I have seen is 0.08 micron lines and spaces using reversal and 2 microns of positive resist. Bill Moffat -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems- talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Michael Cooke Sent: Monday, February 28, 2011 8:07 AM To: General MEMS discussion Subject: Re: [mems-talk] photolithography resolution (su-8 series) You should be able to easily get better than 5 microns Dr Michael Cooke