Majid, KMPR type resist might work well got your application. It can coat up to 70um in one coat. Mike ----- Original Message ----- From: mems-talk-bounces+mstan=microchem.com@memsnet.orgTo: mems-talk@memsnet.org Sent: Sat Aug 06 19:53:55 2011 Subject: [mems-talk] Negative resist foe lift-off and stable at 250C Hi All, Could anybody please suggest a negative tone resist that is suitable for lift-off and is stable up to 250 ° C. I want to achieve a thickness of at least 10 micron. Thanks -- Majid Beidaghi PhD Candidate Department of Mechanical and Materials Engineering Florida International University