Majid, Lets discuss this it may be possible. It will need experiments. Silylation can make positive resist stable up to 300 degrees C and image reversal will give perfect lift off profiles to positive resist. I do not know of a negative resist that offers any hope. Bill Moffat 925 373 8353. ________________________________________ From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mems-talk- bounces+bmoffat=yieldengineering.com@memsnet.org] on behalf of Majid Beidaghi [mbeid001@fiu.edu] Sent: Saturday, August 06, 2011 4:53 PM To: mems-talk@memsnet.org Subject: [mems-talk] Negative resist foe lift-off and stable at 250C Hi All, Could anybody please suggest a negative tone resist that is suitable for lift-off and is stable up to 250 ° C. I want to achieve a thickness of at least 10 micron. Thanks -- Majid Beidaghi PhD Candidate Department of Mechanical and Materials Engineering Florida International University