I also have the same problem, would like to use a sacrificial layer to
release the crosslinked SU8, AZ 40xt was used and not successful.

but did you try the AZ100 resist stripper?

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From: "Kevin Nichols" 
Sent: Wednesday, August 10, 2011 9:56 PM
To: "General MEMS discussion" 
Subject: Re: [mems-talk] Spinning SU 8 over AZ9260

> Use omnicoat from microchem as a release layer.
>
> - Kevin