no, i did not try the resist stripper, though i tried a water soluble sacrificial layer but then the aqueous solution formed droplets on the surface of glass rather than uniform layer! Kind Regards, Sumit Kalsi ________________________________ From: Jerry ChenTo: General MEMS discussion Sent: Thu, 11 August, 2011 9:56:31 AM Subject: Re: [mems-talk] Spinning SU 8 over AZ9260 I also have the same problem, would like to use a sacrificial layer to release the crosslinked SU8, AZ 40xt was used and not successful. but did you try the AZ100 resist stripper?