durusmail: mems-talk: Dry etch 50nm Au film, possible?
Dry etch 50nm Au film, possible?
2011-08-11
2011-08-11
2011-08-11
2011-08-11
2011-08-11
2011-08-14
2011-08-11
2011-08-11
2011-08-14
Dry etch 50nm Au film, possible?
Xiaohui Lin
2011-08-11
Did you mean the recipe for silicon dioxide etch will work for Au etch?

On Thu, Aug 11, 2011 at 1:16 AM, Shay  wrote:

> OXIDE rie will do it
>
> Shay
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