durusmail: mems-talk: Dry etch 50nm Au film, possible?
Dry etch 50nm Au film, possible?
2011-08-11
2011-08-11
2011-08-11
2011-08-11
2011-08-11
2011-08-14
2011-08-11
2011-08-11
2011-08-14
Dry etch 50nm Au film, possible?
Roger Shile
2011-08-11
Please explain.

Roger Shile

-----Original Message-----

OXIDE rie will do it

Shay

-----Original Message-----

Hi all: Is it possible to use any dry etch receipt to etch Cr/Au film
(50nm)?

The mask of etching is Ni.
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