Hi all, I was processing NR9-1000P and find the sidewall pretty rough. Pic
can be found here:

https://picasaweb.google.com/113316121597573259487/September20201102?authuser=0&
authkey=Gv1sRgCOv_isDQ1MeRhwE&feat=directlink

Could anyone suggest any possible solution for that?

    1. substrate: 1mm glass slice, one side is coated by Cr/Au, 10nm/40nm
    2. spin on NR9 at 3000rpm, we are aiming at around 1um thickness, not
critical
    3. pre-bake: 150 oC hotplate for 3 min
    4. exposure: MA6, Ch1, hard contact, 10s, 7.5mJ/cm2
    5. PEB: 100oC hotplate 3 min
    6. develop: RD6,  20s