Hi Kevin, Very good point, thanks a lot for the link. I should try to reduce the exposure dose. Yingtao ________________________________________ From: mems-talk-bounces+y.tian2=lboro.ac.uk@memsnet.org [mems-talk- bounces+y.tian2=lboro.ac.uk@memsnet.org] On Behalf Of Kevin Nichols [kevin.paul..nichols@gmail.com] Sent: 11 January 2012 13:53 To: General MEMS discussion Subject: Re: [mems-talk] SU-8 process development Shay's right. If an AR coating won't work though, the data sheets for SU-8 address this under the "relative dose" tables. In the datasheet for SU-8 3000, for example, this is given in Table 4: http://www.microchem.com/pdf/SU-8%203000%20Data%20Sheet.pdf Table 4: RELATIVE DOSE Silicon 1X Glass 1.5X Pyrex 1.5X Indium Tin Oxide 1.5X Silicon Nitride 1.5 - 2X Gold 1.5 - 2X Aluminum 1.5 - 2X Nickel Iron 1.5 - 2X Copper 1.5 - 2X Nickel 1.5 - 2X Titanium 1.5 - 2 - Kevin