Hi JJ-- In my etch-rate tests, silicon dioxide sputtered with an ion mill had about the same etch rate in 80 deg C KOH as did thermally grown silicon dioxide. Normally oxide etches too fast in KOH to be used as a mask. In your case, you're only etching down about 1 um, so the oxide should work OK. Note that the longer you leave your wafers in the KOH, the more the oxide mask will be etched sideways, making your trenches wider. For the densest, sturdiest oxide, sputter at a high power. --Kirt Williams -----Original Message----- From: mems-talk-bounces+kirt_williams=sbcglobal.net@memsnet.org [mailto:mems-talk-bounces+kirt_williams=sbcglobal.net@memsnet.org] On Behalf Of JJ HU Sent: Saturday, February 11, 2012 10:26 AM To: mems-talk@memsnet.org Subject: [mems-talk] Sputtered oxide as KOH anisotropic wet etching mask Hello everyone, I am planning to perform some KOH anisotropic wet etching of silicon to create V-grooves with ~ 1 um width, and for that I am wondering if I may use sputtered oxide as the etch mask. I have seen a lot of papers using thermal oxide but I would like to see if sputtered oxide would work as well, since I have easy access to a sputtering station. Any advice would be very much appreciated! Thank you in advance, JJ