durusmail: mems-talk: Issues with footing in thin SU8
Issues with footing in thin SU8
2012-09-13
Diane Atkinson
2012-09-13
Daniel Figura
2012-09-14
Diane Atkinson
2012-09-16
shay kaplan
2012-09-16
Diane Atkinson
Issues with footing in thin SU8
Diane Atkinson
2012-09-13
Hello,
       I am trying to process 4um of SU8 3005,and am having issues with the
footing at the bottom of my pattern, I t is about 1-1.5 microns. I have tried
several things and nothing seem to fix this problem, I am about to try CEM, but
am wondering if there is an alternative way to prevent this ,maybe reduce the
PEB ?  Thank you

Also,I tried to send this once but I am not sure if it went so I am resending-
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