durusmail: mems-talk: PECVD silicon nitride step coverage for 5um step
PECVD silicon nitride step coverage for 5um step
2012-11-19
Sheng Zhang
PECVD silicon nitride step coverage for 5um step
Sheng Zhang
2012-11-19
Hi,

Does anyone has experience of PECVD silicon nitride on 5um steps? I'd love
to have some suggestions or recipe to start with.

Thanks!
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply