durusmail: mems-talk: PECVD silicon nitride step coverage for 5um step
PECVD silicon nitride step coverage for 5um step
2012-11-19
PECVD silicon nitride step coverage for 5um step
Sheng Zhang
2012-11-19
Hi,

Does anyone has experience of PECVD silicon nitride on 5um steps? I'd love
to have some suggestions or recipe to start with.

Thanks!
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