durusmail: mems-talk: PECVD silicon nitride step coverage for 5um step
PECVD silicon nitride step coverage for 5um step
2012-11-19
Sheng Zhang
PECVD silicon nitride step coverage for 5um step
Ruiz, Marcos Daniel (SGNCOE)
2012-11-19
Please provide more information about what you have to work with and what you're
trying to accomplish.

1 - What equipment are you working with?

2 - What does your topography look like (open steps, trenches, contact holes)?

3 - What is the composition of the parts you need to process?

Depending on what kind of coverage you need and what equipment you have
available, PECVD may or may not be the best answer for you.

Dan

-----Original Message-----
From: mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org [mailto:mems-talk-
bounces+dan.ruiz=honeywell.com@memsnet.org] On Behalf Of Sheng Zhang
Sent: Monday, November 19, 2012 8:38 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] PECVD silicon nitride step coverage for 5um step

Hi,

Does anyone has experience of PECVD silicon nitride on 5um steps? I'd love
to have some suggestions or recipe to start with.

Thanks!
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