durusmail: mems-talk: High Aspect ratios of SU-8
High Aspect ratios of SU-8
2013-01-14
2013-01-15
2013-02-06
High Aspect ratios of SU-8
Nirmal Punjabi
2013-01-14
Hello,

Greetings for the day.
I want to make SU-8 structures with high aspect ratios ~20:1.
I want to make structures having width upto 10um & thickness of 200um.
I am using SU-8 2100.
Does anybody has some experience in fabricating high aspect ratios
structures in SU-8?
Any experiential tips in this regard will be highly appreciated.
Thank you.

Regards,

Nirmal Punjabi
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