Hi I am trying to do an anisotropic etch of 400 nm nitride layer in a RIE machine. A portion of the nitride is protected by a resist layer on top of it. Can you tell approximate how much thickness of resist would I need so that the resist doesn't get stripped off during the nitride etch? Thanks, Ahmad _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk