durusmail: mems-talk: TMAH reaction with copper
TMAH reaction with copper
TMAH reaction with copper
Ricky Anthony
2013-09-30
Hi All,

I am working with Metal Ion free developers (MIF). I find that some TMAH based
MIF developers react with copper to form complex, while others do not even
though they are TMAH MIF based. What could be the possible explanation behind
this?

Many Thanks,

Ricky Anthony

Microsystems Center
Tyndall National Institute
University College Cork
Cork, IRELAND

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