durusmail: mems-talk: microcantilever fabrication
microcantilever fabrication
2013-10-23
2013-10-23
2013-10-24
2013-10-24
2013-10-28
2013-10-24
microcantilever fabrication
alaa melhem
2013-10-24
Hi Prof. Wolinski,

I would appreciate if you can share the information about fabrication
microcantilever as I am planning to fabricate these cantilever within a month. I
could not find any notes for a microfabrication process of silicon cantilever.

Thank you,
Alaeddin Bani Milhim
PHD candidate at University of Toronto



On Wednesday, October 23, 2013 4:23:48 PM, "Wolinski, Jeffrey P"
 wrote:

Hello, Girija Moona,
I saw your recent cantilever question on mems-talk and I'd be happy to give you
all the information we have on fabrication procedures.  I'm relatively new to
MEMS/nanotech research but I've been doing it (with undergraduate research
students) for several years and we have successfully constructed micro-bridges
and cantilevers.  I'll send a write-up of our work to your email address.  Feel
free to ask me any questions you might have, in particular, requests for more
detailed instructions, since that is the sort of information that is often hard
to glean from research articles (I know!).

Regards,

Jeff Wolinski

Prof. Jeffrey P. Wolinski
Department of Physics
Grove City College, Faculty Box 3137
100 Campus Drive
Grove City, PA 16127-2104

Voice: 724-458-2201
Fax: 724-458-2181

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