Hi Girija,

in fact, there are numbers of ways of how to fabricate a microcantilever
beam.
A lot of them are described in books on MEMS technology (i.e. Menz, Mohr,
Paul). But it is difficult to answer your question since you do not even
describe, which procedure you are going to use (bulk or surface
micromachining) and which material should the cantilever be fabricated
from. For example, a cantilever can be metallic, bimetallic, or polysilicon.

In either way you will most probably have to  fabricate a microstructure
(cantilever geometry) using microlithography and then underetch the
sacrificial matereal to make the beam moveable.


Regards,
Denis



2013/10/23 girija moona 

> hello everyone,
> it would be great if someone could help me microcantilever fabrication. i
> need all the steps in detail... since in am very new to this field and want
> to work in the area to microcantilever sensors. i will be very thankful if
> i get some basic procedure for microcantilever fabrication.
> thanks
>
> Regards
> Girija Moona
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