durusmail: mems-talk: SU-8 Processing and PDMS Spin Coating
SU-8 Processing and PDMS Spin Coating
2014-02-24
2014-02-25
SU-8 Processing and PDMS Spin Coating
Sebastian R Freeman
2014-02-24
Hello everyone,

I am a graduate student making microfluidic devices for the first time. I
am processing SU-8 2050 negative photoresist on a silicon wafer to try and
produce a porous PDMS membrane. My difficulty lies in producing the the
SU-8 structures. I have been having adhesion problems, as well as getting
my structures to develop uniformly. The pattern I am trying to make is
composed of an array of tiny cylindrical posts 50 micros high, with a
diameter of approximately 5 microns, and spaced 15 microns apart from each
other.

The PDMS spin coating is also creating difficulties. When I attempt to peel
off the PDMS from the SU-8, the PDMS rips off my posts. I have applied
Sigmacote as I was told this would lessen the adhesion between PDMS and
SU-8, but it appears to have only helped minimally.

If anyone has any good advice or suggestions of new approaches, I would be
most appreciative. Thank you.
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