durusmail: mems-talk: MF CD-26 Developer
MF CD-26 Developer
2014-06-09
2014-06-09
2014-06-10
MF CD-26 Developer
Mike Stan
2014-06-10
NMD-W contains a surfactant to improve wetting properties.  Dow makes a very
similar product.  It's called MF-24A.The TOK equivalent to CD-26 is NMD-3.  I'm
curious as to why you need to change developers.

Mike

-----Original Message-----
From: mems-talk-bounces+mstan=microchem.com@memsnet.org [mailto:mems-talk-
bounces+mstan=microchem.com@memsnet.org] On Behalf Of Black, Robert
Sent: Monday, June 09, 2014 3:44 PM
To: General MEMS discussion
Subject: Re: [mems-talk] MF CD-26 Developer

We use TOK NMD-W developer. It can be used with i-line or DUV. It is .24N.

Robert

-----Original Message-----
From: mems-talk-bounces+r-black1=ti.com@memsnet.org [mailto:mems-talk-
bounces+r-black1=ti.com@memsnet.org] On Behalf Of Jocelyn Ng
Sent: Friday, June 06, 2014 11:40 PM
To: General MEMS discussion
Subject: [mems-talk] MF CD-26 Developer

Hello,

I'm looking for replacement to the CD-26 developer. It's a TMAH based developer.
Is there any suggestion out there for the replacement developer?

Any comments and suggestions is welcomed.

Thanks lot.

Best Regards,
Jocelyn

Sent from my iPhone
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