We use AZ 726 MIF ("Metal Ion Free", means TMAH-based) from Clariant
Electronic Materials.

André

-----Ursprüngliche Nachricht-----
Von: mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org
[mailto:mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org] Im
Auftrag von Mike Stan
Gesendet: Dienstag, 10. Juni 2014 19:30
An: General MEMS discussion
Betreff: Re: [mems-talk] MF CD-26 Developer

NMD-W contains a surfactant to improve wetting properties.  Dow makes a very
similar product.  It's called MF-24A.The TOK equivalent to CD-26 is NMD-3.
I'm curious as to why you need to change developers.

Mike

-----Original Message-----
From: mems-talk-bounces+mstan=microchem.com@memsnet.org
[mailto:mems-talk-bounces+mstan=microchem.com@memsnet.org] On Behalf Of
Black, Robert
Sent: Monday, June 09, 2014 3:44 PM
To: General MEMS discussion
Subject: Re: [mems-talk] MF CD-26 Developer

We use TOK NMD-W developer. It can be used with i-line or DUV. It is .24N.

Robert

-----Original Message-----
From: mems-talk-bounces+r-black1=ti.com@memsnet.org
[mailto:mems-talk-bounces+r-black1=ti.com@memsnet.org] On Behalf Of Jocelyn
Ng
Sent: Friday, June 06, 2014 11:40 PM
To: General MEMS discussion
Subject: [mems-talk] MF CD-26 Developer

Hello,

I'm looking for replacement to the CD-26 developer. It's a TMAH based
developer.
Is there any suggestion out there for the replacement developer?

Any comments and suggestions is welcomed.

Thanks lot.

Best Regards,
Jocelyn

Sent from my iPhone
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