durusmail: mems-talk: Unremoved SU-8 after exposure
Unremoved SU-8 after exposure
Unremoved SU-8 after exposure
Sajeesh P
2014-07-08
Hi

Have you following the protocol from microchem website.I am doing with su8
2075.
It has two steps of pre baking and two steps of post baking.When i read
your post i seen only one steps each in both pre baking and post baking

The two step pre baking process will help you the strain hardening of SU8.
Otherwise there is a chance of bonding problem.I also applied some HMDS
before coating the SU8 as adhesion agent . check that also

I am also beginner.
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