What is your problem film not sticking? If yes what kind of sputter etch are you doing before the Ni deposit starts. Is this a DC Mag system? What is your chamber base pressure in Torr? Are long is your pre-sputter to the shutter before the deposit? What is your Argon gas pressure? Rick Draper Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison@draper.com W 617-258-3420 C 508-930-3461 -----Original Message----- From: mems-talk-bounces+rmorrison=draper.com@memsnet.org [mailto:mems-talk- bounces+rmorrison=draper.com@memsnet.org] On Behalf Of bhargav panchal Sent: Sunday, November 29, 2015 12:01 PM To: General MEMS DiscussionSubject: [mems-talk] Silicon Carbide Issue We have problem regarding nickle deposition on Silicon nitride by sputtering. Prior to deposition we have removed the oxides from the surface. Please suggest possible solution. Have a good day everyone. Regards, Bhargav Panchal+91 9742712671 _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk ________________________________ Notice: This email and any attachments may contain proprietary (Draper non- public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk