Dear Shay, Thanks for the answer and good wishes! We will definitely try your valuable suggestions. Regards, Mehmet Yilmaz Mechanical Engineer On Wed, Jun 8, 2016 at 6:41 AM, Shaywrote: > Hi Mehmet > The process might work. You need to apply the highest voltage possible. It > should still work with the alumina. Make sure to have the si with no > native oxide. > You will have enough force to bond the surfaces and i thin with 15nm of > alumina, there will be enough oxygen to react with the silicon to create > the bond. Make sure to stop the process once the current dropped to about > 5-10% from the start current. > > Ramadan karim > > > Shay > > > On Jun 6, 2016, at 19:51, Mehmet Yilmaz wrote: > > > > Dear mems-talk community, > > > > Question about anodic wafer bonding of "silicon to aluminum oxide > > coated borosilicate glass (Pyrex)" > > > > We are planning to wafer bond silicon wafer surface to borosilicate glass > > substrate surface via anodic bonding. It seems that this is well known, > and > > documented. Although it is well known, this may bring some complications > to > > our integration process flow. Because of these complications, we are > > looking for alternative approaches that may be tried to reduce the > > complications in the integration process. > > > > An idea that we have that will reduce some process steps and > complications > > is below: > > > > Our integration process directs us to think about wafer bonding of > silicon > > substrate to 15nm aluminum oxide coated borosilicate glass (Pyrex). In > case > > you wonder, 15nm aluminum oxide is ALD (Atomic layer Deposition) coated > on > > Pyrex. > > > > We wonder if anyone of you have any experience with wafer bonding of > > silicon substrate to aluminum oxide coated borosilicate glass (Pyrex), > or a > > similar material stack? If you do not have direct experience, comments > > based on your anodic wafer bonding experience are also very welcome. > > > > Regards, and thanks in advance, > > > > Mehmet Yilmaz > > Mechanical Engineer > > _______________________________________________ > > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > > provider of MEMS and Nanotechnology design and fabrication services. > > Visit us at http://www.mems-exchange.org > > > > Want to advertise to this community? See http://www.memsnet.org > > > > To unsubscribe: > > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk