Less then 3:1 width to height and 12 mils (.012 inch) its a snap to
microdrill, you could easily go to 5:1.

Vic

----- Original Message -----
From: Roger Brennan 
To: 
Sent: Saturday, February 23, 2002 1:05 PM
Subject: [mems-talk] Drilling through holes


> Hi everybody!
>
> I'm now wet etching to make through holes in 12 mil (305 microns) <100>
Si.
>  The desired hole size is about 10 mils by 30 mils  (254 microns by 762
> microns).
>
> Is laser or physical drilling a possible alternative?
>
> How about deep RIE?
>
> Thanks.
>
>
> Roger Brennan
> Home:
> 1403 Forrestal Avenue
> San Jose, CA 95110
> (408)453-0711 (telephone)
> (408)573-9407 (fax)
> rogerbr@earthlink.net
>
> Work:
> Endevco
> 355 N. Pastoria Ave.
> Sunnyvale, CA 94085
> 408-739-3533 ext 204
> roger.brennan@endevco.com
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