Hello Roger,
our company Laser  Light Technologies  is doing a lot of laser holes drilling
in Silicon. We can hold positional accuracy for holes +/-5um for size and
location to feducials. We can work from AutoCAD file or drawing with
dimensions.
Feel free to request additional information or check our web at
www.laserusa.com
Regards,
Alex Pozdin,
Director of Engineering
5 Danuser Dr.
Hermann, MO 65041 USA
ph. 573-486-5500
fax 573-486-5540
e-mail: apozdin@laserusa.com