try phosensitive polyimide or BCB
Shay Kaplan

"Martin O. Patton" wrote:

> Dear mems-talkers,
>
> Is there a photoimageable insulator that can be applied to insulate trenches
> in III-V wafers from metal contacts which cross the trenches?  I only have
> wet chemistry, so don't tell me to RIE.
>
> Thanks,
>
> Marty
>
> Martin O. Patton
> Senior Research Engineer
> Essential Research Inc.
> 6410 Eastland Road Suite D
> Cleveland, Ohio 44142
> www.er.com
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