Swiss, NJIT Prof. K. Farmer et. al. has used thin silicon wafers for wafer bonding. Two references I used are as follows: "Bondability and Surface Roughness of Ultra-thin Single Crystal Silicon Wafers," M. Beggans, K. Farmer, J. Federici, T. G. Digges, Jr., S. Garoflini, D. Hensley, Electrochemical Society Proceedings Volume 97-36, p. 64. "Optical Pressure Sensor Head Fabrication using Ultra-thin Silicon Wafer Anodic Bonding," M Beggans, D. Ivanov, S. Fu, T. Diggs, Jr., K. Farmer, Proceedings of SPIE 1999 International Symposium on Design, Test and Microfabrication of MEMS and MOEMS, Paris France, Volume 3680, p. 773. Hope this helps, Loren. -----Original Message----- From: Swiss Zhang [mailto:janeswiss2000@hotmail.com] Sent: Tuesday, October 15, 2002 4:56 PM To: mems-talk@memsnet.org Subject: [mems-talk] How to handle the thin Si wafer of 10-um thick Hello, Has anybody had the experience with handling 10-um thin wafer? I want to deposit Cr/Au layer using E-beam evaporator. I am afraid it will break the wafer during evaporation due to high temperature and stress. Does anybody know if it works Ok? And also I think I better bond the thin wafer to another standard 500um wafer together, but i don't know what kind of adhesive materials can resist high temperature in E-beam evaporator. Thanks for your suggestion. Swiss _________________________________________________________________ Surf the Web without missing calls! Get MSN Broadband. http://resourcecenter.msn.com/access/plans/freeactivation.asp _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/