durusmail: mems-talk: Piezoelectricity Measurement
fatigue testing
2002-10-23
Chris Hitchcock
Piezoelectricity Measurement
2002-10-23
Xiaoqin Huang
2002-10-24
Vincent Mortet
2002-10-24
Priyanka Aggarwal (2 parts)
2002-10-24
Raj Gupta
2002-10-25
Vincent Mortet
Attaching Word Docs. was Re: [mems-talk] Piezoelectricity Measurement
2002-10-27
Michael Lake
RE: Attaching Word Docs. was Re: [mems-talk] Piezoelectricity Measurement
2002-10-28
David Nemeth
Piezoelectricity Fabrication
2002-10-25
Priyanka Aggarwal
Piezoelectricity Measurement
Raj Gupta
2002-10-24
Hi Priyanka and Jenny,

I hear the next release of CoventorWare will be capable of non-linear
piezoelectric analysis.  I am sure other tools exist for this purpose,
such as FEMLAB integrated with MATLAB.  In general, these finite-element
(FEM) tools will be useful for design of test structure geometry.
Resonant frequency analysis may be more involved than static analysis,
but it too should be possible.

With any material property test structure, you must realize the overall
geometry, including precise (and accurate) values of thicknesses and
lateral dimensions, and compliance of boundaries.  In many cases
boundary conditions dominate behavior.  For example, assuming fixed
boundary conditions can be an oversimplification and will lead to errors
in extracted material properties.

Regarding your specific questions, more details would help, but the
following link may be of use:

http://www.msiusa.com/piezo_download_listing.htm#PART1-INT.pdf

Good luck.
Raj


Priyanka Aggarwal wrote:

> Hi,
> I am also working on the same lines. I was wondering where should I have the
> metal contacts,I want to have them on the fixed end of the cantilever, but
> I am not sure how to make metal contacts till that surface. CAn you suggest
> something.I am attching a document to make it clearer.
> Thanks
> Priyanka
>
>
>
>
>
> ----- Original Message -----
> From: "Vincent Mortet" 
> To: 
> Sent: Thursday, October 24, 2002 2:59 AM
> Subject: RE: [mems-talk] Piezoelectricity Measurement
>
>
>
>>Hello,
>>
>>1/To measure the reverse piezoelectric coeffience d33 of "a layer" you have
>>to make a sandwich of it, between two elctectods on a thick substrate (2mm)
>>you can apply a AC voltage (frequency f0) to the layer and you measure the
>>displasment of the top surface with a calibrated AFM or interferometer.
>>
>>For the AFM method, you have to use the A-B signal from the photodetector with
>>the frequency f0, ie filtered with an lock-in amplifier.
>>
>>2/It exists a methode to measure the direct piezoelectric coefficient e31
>>on which you collect the charges created by the piezo on the electrode
>>during the vibration on a cantilever covered with the piezoelectric
>>material.
>>
>>Here are some refs to help you on points  1/ A-L Kholin et al. Rev Sci
>>Instrum Vol 67 No 5 May 1996 1935
>>M-A Dubois et al, Appl Phys Lett,  Vol 89, No 11 (2001) 6389
>>C-M Lueng et al J Appl Phys, Vol 88, No 9 (2000) 5360
>>J-A Christman et al App Phys Lett, Vol73, No 26 (1998) 3851
>>
>>2/ E Cattan et al, Sensors and Actuators 74 (1999) 60
>>B Jaber et al, Sensors and Actuators A 63 (1997) 91
>>J-F Shepard Jr et al, Sensors and Actuators A 71 (1998) 133
>>
>>Best regards,
>>Vincent Mortet
>>
>>-----Original Message-----
>>From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
>>Behalf Of Xiaoqin Huang
>>Sent: woensdag 23 oktober 2002 19:56
>>To: mems-talk@memsnet.org
>>Subject: [mems-talk] Piezoelectricity Measurement
>>
>>
>>Hi all,
>>
>>I am planning to measure the piezoelectricity of ZnO, but I just know a
>>bit about this kind of measurement. If you are familiar with this
>>measurement, please give me some suggestions. Thank you very much.
>>
>>Jenny X. Huang


--

Raj Gupta, Director
   Nanotechnology & MEMS Consulting
   33 Vandewater Street
   Suite 205
   San Francisco, CA  94133-1967
   +1 415 362 3694
Website: http://www.mindspring.com/~rajgupta
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